What Is a Glass Micro-Fused Pressure Sensor and What Are Its Advantages?
Publication date：2026-10-13 00:19
I. What Is a Glass Micro-Fused Pressure Sensor?
A glass micro-fused pressure sensor is a high-performance pressure measurement device manufactured using a special glass micro-fusion process. It is formed by micro-fusion bonding a silicon piezoresistive chip with a glass substrate at high temperature. It features high accuracy, good stability and strong corrosion resistance, and is widely used in fields such as industrial automation, aerospace and medical equipment.
The core advantage of this sensor lies in its unique manufacturing process——- glass micro-fusion technology, which can achieve a perfect bond between the silicon chip and the glass substrate at the molecular level, avoiding problems such as aging and creep caused by traditional adhesive methods.
II. Working Principle of the Glass Micro-Fused Pressure Sensor
The glass micro-fused pressure sensor works based on the piezoresistive effect, and its core component is a silicon diaphragm with a Wheatstone bridge. When external pressure acts on the sensor: the silicon diaphragm deforms⇒the resistance of the piezoresistors embedded in the diaphragm changes accordingly⇒the bridge outputs a voltage signal proportional to the pressure⇒the signal is amplified and conditioned before outputting a standard signal.
Sensors made with the glass micro-fusion process have higher sensitivity, because the thermal expansion coefficients of the glass substrate and the silicon chip match well, reducing measurement errors caused by temperature changes.
III. Advantages of the Glass Micro-Fused Pressure Sensor
1. Excellent long-term stability: The glass micro-fusion process eliminates the aging problem of traditional adhesives, ensuring the sensor maintains stable performance during long-term use, with annual drift controlled within 0.1%FS.
2. Excellent temperature characteristics:-40°C to 125°C, maintaining high accuracy over a wide temperature range, the temperature error can be controlled within±0.5%FS.
3. Strong corrosion resistance: The glass material itself has excellent corrosion resistance, and an optional 316L stainless steel isolation diaphragm makes it suitable for harsh media measurement.
4. High-precision measurement: Typical accuracy can reach±0.1%FS, with resolution up to 0.01%FS.
IV. Application Scenarios
Industrial process control: pressure monitoring in petrochemical, power and energy and other industries
Medical equipment: precision pressure measurement for ventilators, dialysis machines and other medical instruments
Automotive electronics: pressure detection in engine management systems and brake systems
Aerospace: aircraft hydraulic systems and cabin pressure monitoring
